Back
CHIP VLF

Vertical unidirectional laminar flow tunnel
with “C” shaped supporting legs

 

Applications:

  • Etching unit protection and metallization
  • Mask
  • Chip on board
 

 

Download the PDF file:
(click here for the plug-in)


(328 Kb)
  

 

Features:

  • Class ISO 5 with HEPA filters and Class ISO 4 with ULPA filters
  • Easy maintenance
  • Great flexibility
© BIO COM srl 2004 - Web@Master - biocom.it@gmail.com - R.E.A. 1464553 - Reg.Imprese Milano 11385460156
Tribunale Milano 351288/8602/38 - Cap.Soc. 92.000 Eu. i.v. - C.F. e P.Iva 11385460156 - Tel. +39 0382 43.41.56 - Fax +39 0382 43.41.57